ALEXANDRIA, Va., April 2 -- United States Patent no. 12,266,554, issued on April 1, was assigned to Brooks Automation US LLC (Clemsford, Morocco).
"Substrate processing apparatus" was invented by Jairo T. Moura (Marlborough, Mass.) and Roumen Botev (Groton, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets...