US Patent Issued to BROOKS AUTOMATION (GERMANY) on Nov. 4 for "EUV reticle stocker and method of operating the same" (German Inventor)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,453, issued on Nov. 4, was assigned to BROOKS AUTOMATION (GERMANY) GMBH (Germany).

"EUV reticle stocker and method of operating the same" was invented by Lutz Rebstock (Gaienhofen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A one-piece clamping device, a storage system and an operating method for an EUV reticle stocker are provided. The required space for storing EUV reticles is significantly reduced while ensuring a high quality storage environment for the stored EUV reticles. A further aspect provides a stocker for storing EUV reticles."

The patent was filed on May 10, 2021, under Application No. 18/252,902.

*For further information, ...