US Patent Issued to BROOKS AUTOMATION (GERMANY) on Feb. 10 for "Method and system for inspection of an inner pod or an outer pod of an EUV pod" (German Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,667, issued on Feb. 10, was assigned to BROOKS AUTOMATION (GERMANY) GMBH (Germany).

"Method and system for inspection of an inner pod or an outer pod of an EUV pod" was invented by Lutz Rebstock (Gaienhofen, Germany), Ulrich Quarti (Constance, Germany) and Tobias Forstner (SteiBlingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "Method for inspection of an inner pod EIP and/or an outer pod EOP of an EUV pod, respectively including a base member and a cover member. The method includes acquiring inspection data sets using a line scan camera and an area scan camera, inspecting the cover member in a first inspection unit using the line scan c...