ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,276, issued on Nov. 18, was assigned to BRIGHTEST TECHNOLOGY TAIWAN Co. LTD. (Hsinchu County, Taiwan).
"Wafer inspection system for mitigating undesired effects associated with position offset of wafer" was invented by Zhong-Hua Dong (Sunnyvale, Calif.) and Chengwei Hsu (Hsinchu County, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer inspection system includes an optical device, a movable stage, a position measurement device, and a control device. The optical device is configured to generate a light toward a wafer and capture a reflected light. The movable stage is configured to move the wafer. The position measurement device is config...