US Patent Issued to BETONE TECHNOLOGY SHANGHAI on June 10 for "Reciprocating rotary CVD equipment and application method" (American, Chinese Inventors)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,325,917, issued on June 10, was assigned to BETONE TECHNOLOGY SHANGHAI INC. (Shanghai).

"Reciprocating rotary CVD equipment and application method" was invented by Xiaoliang Jin (San Jose, Calif.), Waleyweitsung Sung (San Jose, Calif.) and Zhongyun Li (Shanghai).

According to the abstract* released by the U.S. Patent & Trademark Office: "A reciprocating rotary CVD apparatus and a method for applying same. The reciprocating rotary CVD apparatus includes a cavity, a wafer heating base, a rotating apparatus. The rotating apparatus is located outside the cavity and includes a rotating power mechanism and a rotating sealing mechanism, and the rotating sealing mechanism includes a rotating...