ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,081, issued on Oct. 14, was assigned to BENEQ OY (Espoo, Finland).
"Nozzle head and apparatus" was invented by Pekka Soininen (Espoo, Finland) and Mikko Soderlund (Espoo, Finland).
According to the abstract* released by the U.S. Patent & Trademark Office: "A nozzle head and apparatus for subjecting a surface of a substrate to alternate surface reactions of at least two precursors (A, B) includes an output face, at least one gas supply nozzle, and at least one discharge nozzle. The nozzle head includes on the output face in the following order: a first zone end nozzle, a gas supply nozzle and a second zone end nozzle, repeated one or more times. The first zone end nozzle is arrang...