US Patent Issued to BEILab on March 4 for "Substrate processing apparatus" (South Korean Inventor)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,760, issued on March 4, was assigned to BEILab corp. (Ansan-si, South Korea).

"Substrate processing apparatus" was invented by Jihyun Seo (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a substrate processing apparatus including: a load lock chamber configured to accommodate a substrate and be sealed in a vacuum state; a reaction chamber configured to accommodate the load lock chamber; and an opening/closing member extending toward the load lock chamber accommodated in the reaction chamber and configured to open or close the load lock chamber."

The patent was filed on Jan. 5, 2022, under Applica...