US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on Sept. 30 for "Data collection method, device, and system of semiconductor processing equipment" (Chinese Inventor)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,430,354, issued on Sept. 30, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Data collection method, device, and system of semiconductor processing equipment" was invented by Jiajia Chai (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a data collection method, a data collection device, and a data collection system of the semiconductor processing equipment. The method includes receiving an activated data collection plan via the first communication interface, determining equipment data information to be collected in the data collection plan, sending the equipment data information to th...