US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on Oct. 21 for "Wafer boat temporary storage device and semiconductor processing device" (Chinese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,376, issued on Oct. 21, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Wafer boat temporary storage device and semiconductor processing device" was invented by Jinlong Li (Beijing) and Jianguo Li (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device includes two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively. The wafer boat includes two positioning parts arranged at two ends in the length direction and spaced ap...