US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on May 27 for "Water replenishment control method for semiconductor process device and semiconductor process device" (Chinese Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,314,066, issued on May 27, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Water replenishment control method for semiconductor process device and semiconductor process device" was invented by Kaiyue Cao (Beijing), Fei Gao (Beijing), Yang Wang (Beijing), Fan Li (Beijing), Hao Yang (Beijing), Zhe Yang (Beijing), Zhihao Ren (Beijing) and Qiang Zhang (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "A water supply control method includes: obtaining water supply time period information that each of the plurality of furnace tubes needs to reserve; according to the water supply time period information that each of the plura...