US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on May 27 for "Carrier device, semiconductor apparatus, and residual charge detection method" (Chinese Inventor)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,706, issued on May 27, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Carrier device, semiconductor apparatus, and residual charge detection method" was invented by Jian Liu (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure discloses a carrier device, a semiconductor apparatus, and a residual charge detection method. The disclosed carrier device is configured to carry a wafer in a semiconductor apparatus. The carrier device includes an electrostatic carrier plate and at least three positioning members, wherein the electrostatic carrier plate includes a carrying surface configured to carry t...