US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on May 13 for "Power adjustment method of upper electrode power supply and semiconductor process apparatus" (Chinese Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,460, issued on May 13, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Power adjustment method of upper electrode power supply and semiconductor process apparatus" was invented by Jing Wei (Beijing), Yu Zhang (Beijing), Gang Wei (Beijing), Jing Yang (Beijing), Guibin Wang (Beijing) and Xin Yue (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a power adjustment method of an upper electrode power supply of a semiconductor process apparatus. The method includes obtaining a processing load of an upper electrode power supply of a reference process chamber and a processing load of an upp...