US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on March 18 for "Carrying device and semiconductor processing apparatus" (Chinese Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,252,776, issued on March 18, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Carrying device and semiconductor processing apparatus" was invented by Qing Chang (Beijing), Bing Li (Beijing) and Mengxin Zhao (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a carrying device and a semiconductor processing apparatus. The carrying device includes a heating plate and a cooling plate, the heating plate and the cooling plate are spaced apart, and a thermal insulation region is formed between the heating plate and the cooling plate. The carrying device of the present disclosure not only can pr...