US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on Aug. 19 for "Power control method and device of lower radio frequency power supply and semiconductor processing equipment" (Chinese Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,593, issued on Aug. 19, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Power control method and device of lower radio frequency power supply and semiconductor processing equipment" was invented by Jing Wei (Beijing), Yu Zhang (Beijing), Gang Wei (Beijing), Guodao Shan (Beijing), Chenyu Zhong (Beijing), Yanyan You (Beijing) and Jing Yang (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "A power control method of a lower RF power supply of semiconductor processing equipment includes, when a processing chamber starts semiconductor processing, with a predetermined power compensation equation and according to a pre-ob...