US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on Aug. 12 for "Collection assembly and semiconductor pre-cleaning chamber" (Chinese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,920, issued on Aug. 12, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Collection assembly and semiconductor pre-cleaning chamber" was invented by Lei Zhu (Beijing), Hao Guo (Beijing) and Kui Xu (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention provides a collection assembly and a semiconductor pre-cleaning chamber, which relate to the semiconductor processing apparatus field. The collection assembly is configured to collect particle impurities in the semiconductor pre-cleaning chamber, and includes a protection plate and a collection plate arranged at an interval in the semiconductor pre-cleaning c...