US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on April 15 for "Shield cooling assembly, reaction chamber and semiconductor processing apparatus" (Chinese Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,096, issued on April 15, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Shield cooling assembly, reaction chamber and semiconductor processing apparatus" was invented by Qing Chang (Beijing), Bing Li (Beijing) and Guodong Bian (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "A shield cooling assembly includes an adapter configured to fix a shield in the chamber. The adapter includes a first surface and a second surface facing an outer side surface of the shield and a bottom surface of a bottom wall of the shield, respectively. A predetermined gap is provided between the first surface and the outer side surface of...