US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on April 15 for "Semiconductor processing apparatus" (Chinese Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,123, issued on April 15, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Semiconductor processing apparatus" was invented by Jingfeng Wei (Beijing) and Qing She (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure discloses a semiconductor processing apparatus, which is configured to perform processing on a wafer. The disclosed semiconductor processing apparatus includes a vacuum interlock chamber, a plurality of apparatus bodies, the apparatus body including a transfer platform, and at least two reaction chambers being arranged along a circumferential direction of the transfer platform, and a t...