US Patent Issued to BEIJING NAURA MICROELECTRONICS EQUIPMENT on April 1 for "Semiconductor processing apparatus and mixing inlet device" (Chinese Inventors)

ALEXANDRIA, Va., April 2 -- United States Patent no. 12,264,393, issued on April 1, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).

"Semiconductor processing apparatus and mixing inlet device" was invented by Jingfeng Wei (Beijing), Lei Zhu (Beijing), Hong Ji (Beijing) and Keke Zhao (Beijing).

According to the abstract* released by the U.S. Patent & Trademark Office: "A mixing inlet device of semiconductor processing equipment is arranged at a top of a process chamber of the semiconductor processing equipment and configured to input a process gas into the process chamber. The mixing inlet device includes a cover assembly and a mixing inlet block. A bottom of the cover assembly covers the top of the process cha...