ALEXANDRIA, Va., April 2 -- United States Patent no. 12,263,574, issued on April 1, was assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT Co. LTD. (Beijing).
"Manipulator" was invented by Hao Guo (Beijing).
According to the abstract* released by the U.S. Patent & Trademark Office: "The manipulator of embodiments of the present disclosure is configured to transfer a wafer and includes a finger structure and a plurality of support members. The plurality of support members are arranged at the finger structure and distributed at intervals on a same circumference. Each support member is configured to contact an edge of the wafer to support the wafer to prevent the wafer from contacting the finger structure. With the manipulator of embodimen...