US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on Sept. 9 for "Workpiece processing apparatus with thermal processing systems" (German Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,758, issued on Sept. 9, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Workpiece processing apparatus with thermal processing systems" was invented by Rolf Bremensdorfer (Bibertal, Germany) and Dieter Hezler (Lonsee-Halzhausen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a gas delivery system configured to flow one or more process gases into the processing chamber from the a...