US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on Oct. 14 for "Workpiece processing apparatus with gas showerhead assembly" (German, American Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,078, issued on Oct. 14, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd (Beijing) and Mattson Technology Inc. (Fremont, Canada).

"Workpiece processing apparatus with gas showerhead assembly" was invented by Michael Yang (Palo Alto, Calif.), Yun Yang (Berwyn, Pa.), Manuel Sohn (Ulm, Germany), Silke Hamm (Laupheim, Germany), Alex Wansidler (Blaustein, Germany), Dieter Hezler (Lonsee-Halzhausen, Germany) and Rolf Bremensdorfer (Bibertal, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece sup...