US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on Nov. 18 for "Induction coil assembly for plasma processing apparatus" (California Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,077, issued on Nov. 18, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Induction coil assembly for plasma processing apparatus" was invented by Maolin Long (Santa Clara, Calif.) and Yu Guan (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An induction coil assembly is disclosed including two induction coils. Each induction coil includes a first winding commencing from a first terminal end in a first position in the z-direction and transitioning to a radially inner position in a plane normal to the z-direction and a second winding commencing from the radially ...