US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on June 24 for "Workpiece processing apparatus with outer gas channel insert" (California Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,981, issued on June 24, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Workpiece processing apparatus with outer gas channel insert" was invented by Maolin Long (Santa Clara, Calif.) and Weimin Zeng (Santa Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas injection assembly for injecting gas into a processing chamber is provided. In some examples, the gas injection assembly can include an inlet for receiving a gas flow. The gas injection assembly can include a plurality of gas feed ports for distributing the gas flow received from the inlet. The gas injection...