ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,312, issued on June 17, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).
"Configurable faraday shield" was invented by Maolin Long (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A configurable Faraday shield is provided. The configurable Faraday shield includes a plurality of ribs. Each of the ribs can be spaced apart from one another along a circumferential direction. Furthermore, at least a portion of the configurable Faraday shield is movable between at least a first position and a second position to selectively couple the configurable Faraday shield to ...