US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on July 8 for "Workpiece support for a thermal processing system" (German Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,352,306, issued on July 8, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Workpiece support for a thermal processing system" was invented by Manuel Sohn (Ulm, Germany), Rolf Bremensdorfer (Bibertal, Germany) and Dieter Hezler (Lonsee-Halzhausen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A workpiece support for a thermal processing system is provided. The workpiece support includes a rotor configured to support a workpiece. The workpiece support further includes a gas supply. The gas supply can include a plurality of bearing pads. Each of the bearing pads can be posit...