US Patent Issued to Beijing E-Town Semiconductor Technology, Mattson Technology on July 1 for "Enhanced ignition in inductively coupled plasmas for workpiece processing" (California Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,677, issued on July 1, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Mattson Technology Inc. (Fremont, Calif.).

"Enhanced ignition in inductively coupled plasmas for workpiece processing" was invented by Stephen E. Savas (Pleasanton, Calif.) and Shawming Ma (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Plasma processing apparatus and associated methods are provided. In one example, a plasma processing apparatus includes a plasma chamber. The plasma processing apparatus includes a dielectric wall forming at least a portion of the plasma chamber. The plasma processing apparatus includes an inductive ...