US Patent Issued to Beijing E-Town Semiconductor Technology, Matson Technology on July 15 for "Rapid thermal processing system with cooling system" (German Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,194, issued on July 15, was assigned to Beijing E-Town Semiconductor Technology Co. Ltd. (Beijing) and Matson Technology Inc. (Fremont, Calif.).

"Rapid thermal processing system with cooling system" was invented by Manuel Sohn (Neu-Ulm, Germany), Rolf Bremensdorfer (Bibertal, Germany), Silke Hamm (Laupheim, Germany) and Dieter Hezler (Lonsee-Halzhausen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus, systems, and methods for processing workpieces are provided. In one example, such a method for performing a spike anneal rapid thermal process may include controlling a heat source to begin heating a workpiece supported on a workpiece ...