US Patent Issued to Battelle Savannah River Alliance on Nov. 11 for "Sputtering apparatus and related systems and methods for sputtering substrates" (Georgia, South Carolina Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,129, issued on Nov. 11, was assigned to Battelle Savannah River Alliance LLC (Aiken, S.C.).

"Sputtering apparatus and related systems and methods for sputtering substrates" was invented by Patrick A. Ward (Aiken, S.C.), Zachary Duca (Augusta, Ga.) and John T. Bobbitt III (Evans, Ga.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sputtering apparatus includes a substrate holder assembly configured to support a plurality of elongated substrates relative to a sputtering source. Each elongated substrate of the plurality of elongated substrates extends along a respective substrate axis. The sputtering apparatus also includes a holder drive assembly tha...