US Patent Issued to BATTELLE MEMORIAL INSTITUTE on May 27 for "High resolution imaging of microelectronic devices" (Ohio Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,105, issued on May 27, was assigned to BATTELLE MEMORIAL INSTITUTE (Columbus, Ohio).

"High resolution imaging of microelectronic devices" was invented by Thomas F. Kent (Columbus, Ohio) and Jeffrey A. Simon (Columbus, Ohio).

According to the abstract* released by the U.S. Patent & Trademark Office: "In an imaging method, a focal point of a focused optical beam is sequentially mechanically positioned at coarse locations in or on an integrated circuit (IC) wafer or chip. At each coarse location, a two-dimensional (2D) image or mapping tile is acquired by steering the focal point to fine locations on or in the IC wafer or chip using electronic beam steering and, with the focal point...