US Patent Issued to Battelle Memorial Institute on Feb. 25 for "Optical end-pointing for integrated circuit delayering; systems and methods using the same" (Ohio Inventors)

ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,236,573, issued on Feb. 25, was assigned to Battelle Memorial Institute (Columbus, Ohio).

"Optical end-pointing for integrated circuit delayering; systems and methods using the same" was invented by Jonathan Scholl (Oakwood, Ohio), Nicholas Darby (Columbus, Ohio) and Joshua Baur (Dublin, Ohio).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems for determining an end-point of a delayering process using optical end-point detection are described. In embodiments, the systems include a controller with an optical end-pointing (OE) module that is configured to determine an end-point of a delayering process based at least in part on the color or thickness of...