ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,378,439, issued on Aug. 5, was assigned to BASF SE (Ludwigshafen am Rhein, Germany).
"Compositions for tungsten etching inhibition" was invented by Michael Lauter (Ludwigshafen am Rhein, Germany), Haci Osman Guevenc (Ludwigshafen am Rhein, Germany), Wei Lan Chiu (Taoyuan, Taiwan) and Te Yu Wei (Taoyuan, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The presently claimed invention relates to compositions and methods for inhibition of etching. The presently claimed invention particularly relates to a composition and methods for inhibition of tungsten etching."
The patent was filed on Aug. 4, 2020, under Application No. 17/632,816.
*For further in...