US Patent Issued to AXIOMATIQUE TECHNOLOGIES on May 20 for "Methods and apparatus for detecting defects in semiconductor systems" (California, Florida Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,112, issued on May 20, was assigned to AXIOMATIQUE TECHNOLOGIES INC. (Fremont, Calif.).

"Methods and apparatus for detecting defects in semiconductor systems" was invented by Trevor A. Norman (Fremont, Calif.), Robert Mamazza (Palm Harbor, Fla.) and Francisco Xavier Machuca (Oakland, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A defect detection system comprising of an incoherent light source and a collimating light source attachment to produce spatially coherent light waves (e.g., X-rays) that are capable of deeply penetrating a device under test (e.g., a semiconductor). Changes in the spatial coherence of the light waves incident upon th...