US Patent Issued to ATLANTIC INERTIAL SYSTEMS on July 8 for "Fabrication of MEMS structures from fused silica for inertial sensors" (British Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,351,451, issued on July 8, was assigned to ATLANTIC INERTIAL SYSTEMS Ltd. (Plymouth, Great Britain).

"Fabrication of MEMS structures from fused silica for inertial sensors" was invented by Christopher Paul Fell (Cheltenham, Great Britain), Ian Michael Sturland (Bristol, Great Britain) and Tracey Ann Hawke (Bristol, Great Britain).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for forming a MEMS structure for an inertial sensor from fused silica includes: depositing a conductive layer on one or more selected regions of a first surface of a fused silica substrate, and illuminating areas of the fused silica substrate with laser radiation in a patter...