ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,818, issued on Jan. 27, was assigned to ASMPT SINGAPORE PTE. LTD. (Singapore).
"Pick-up chuck with gas bearing structure" was invented by Suribabu Cheliboni (Singapore), Ka Shing Kwan (Singapore) and Naveen Kumar Gupta (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "A pick-up chuck for handling a substrate has a chuck body defining a support surface, a gas relay aperture for transmitting a gas, a vacuum aperture portion configured in use to generate a vacuum force to pick up the substrate, and a flow of said gas through the gas relay aperture onto the said support surface towards the vacuum aperture portion. A gas bearing structure arrange...