ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,392,390, issued on Aug. 19, was assigned to ASMPT SINGAPORE PTE. LTD. (Singapore).
"Apparatus and method for vibration attenuation" was invented by Jinchun Huang (Hong Kong), Zhenyong Bai (Hong Kong), Huawei Guan (Hong Kong), Ping Kong Choy (Singapore) and Ka Shing Kwan (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure. The support structure is isolated from a base by a resilient vibration isolator. The apparatus includes a force compensation system coupled to the support structure for applying one or mo...