US Patent Issued to ASML Netherlands on Sept. 23 for "Charged particle optical device, objective lens assembly, detector, detector array, and methods" (Dutch Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,387, issued on Sept. 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Charged particle optical device, objective lens assembly, detector, detector array, and methods" was invented by Marco Jan-Jaco Wieland (Delft, Netherlands) and Albertus Victor Gerardus Mangnus (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The embodiments of the present disclosure provide various techniques for detecting backscatter charged particles, including accelerating charged particle sub-beams along sub-beam paths to a sample, repelling secondary charged particles from detector arrays, and providing devices and detectors which c...