ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,405,539, issued on Sept. 2, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Substrate support and substrate table" was invented by Coen Hubertus Matheus Baltis (Eindhoven, Netherlands), Nicolaas Ten Kate (Almkerk, Netherlands), Marcus Martinus Petrus Adrianus Vermeulen (Leende, Netherlands), Siegfried Alexander Tromp (Knegsel, Netherlands), Frank Pieter Albert Van Den Berkmortel (Deurne, Netherlands), Niek Jacobus Johannes Roset (Eindhoven, Netherlands), Gijs Kramer (Nijmegen, Netherlands), Nicolaas Petrus Marcus Brantjes (Eindhoven, Netherlands) and Michiel Theodorus Jacobus Fonteyn (Waalre, Netherlands).
According to the abstract* released by the U.S. Patent & Trad...