ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,472, issued on Oct. 7, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Cooling hood for reticle" was invented by Marcus Adrianus Van De Kerkhof (Helmond, Netherlands) and Victor Antonio Perez-Falcon (Golden, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods are provided for removing heat from a reticle. An example method can include generating, by a cooling controller, a cooling control signal based on timing data for a projection of a patterned radiation beam formed by illuminating an exposed area on a reticle supported by a reticle table, absorption data for the exposed area, and a target heat t...