US Patent Issued to ASML Netherlands on Oct. 21 for "Leveling sensor in multiple charged-particle beam inspection" (California Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,324, issued on Oct. 21, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Leveling sensor in multiple charged-particle beam inspection" was invented by Jian Zhang (San Jose, Calif.), Yan Wang (San Jose, Calif.), Liang Tang (San Jose, Calif.) and Yixiang Wang (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An improved leveling sensor and method for adjusting a sample height in a charged-particle beam inspection system are disclosed. An improved leveling sensor comprises a light source configured to project a first pattern onto a sample and a detector configured to capture an image of a projected pattern after the first ...