ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,452, issued on Nov. 4, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Electrostatic clamp" was invented by Gustaaf Galein Van Eden (Utrecht, Netherlands), Cung Vuong Nguyen (Roermond, Netherlands) and Ksenia Sergeevna Makarenko (Veldhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic clamp for holding an object by electrostatic force is disclosed. The electrostatic clamp comprises a dielectric member having a plurality of conductive burls extending from a surface to define a plane in which the object is held, and a conductive element extending between and connecting the plurality of burls. The conducti...