US Patent Issued to ASML NETHERLANDS on Nov. 18 for "Object table, stage apparatus, holding method and lithographic apparatus" (Dutch Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,645, issued on Nov. 18, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Object table, stage apparatus, holding method and lithographic apparatus" was invented by Michael Marinus Anna Steur (Eindhoven, Netherlands), Bas Jansen (Rosmalen, Netherlands), Andre Bernardus Jeunink (De Lutte, Netherlands) and Johannes Adrianus Cornelis Maria Pijnenburg (Moergestel, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrange...