ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,257, issued on May 13, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Monolithic particle inspection device" was invented by Ilse Van Weperen (Veldhoven, Netherlands), Arjan Johannes Anton Beukman (Son en Breugel, Netherlands), Mohamed Swillam (Wilton, Conn.), Justin Lloyd Kreuzer (Trumbull, Conn.) and Stephen Roux (New Fairfield, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods are provided for detecting a particle on a substrate surface. An example method can include receiving, by a grating structure, coherent radiation from a radiation source. The method can further include generating, by th...