ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,714, issued on March 4, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Lens designs" was invented by Laura Del Tin (The Hague, Netherlands), Almut Johanna Stegemann (Wateringen, Netherlands), German Aksenov (Delft, Netherlands), Diego Martinez Negrete Gasque (Delft, Netherlands) and Pieter Lucas Brandt (Son, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is an multi-array lens configured in use to focus a plurality of beamlets of charged particles along a multi-beam path, wherein each lens in the array comprises: an entrance electrode; a focusing electrode and a support. The focusing electrode is down b...