ALEXANDRIA, Va., March 12 -- United States Patent no. 12,249,481, issued on March 11, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Stage anti-fretting mechanism for roller bearing lifetime improvement" was invented by Mark Henricus Wilhelmus Van Gerven (Eindhoven, Netherlands), Johannes Hubertus Antonius Van De Rijdt (Gemert, Netherlands), Michael Johannes Christiaan Ronde (Berghem, Netherlands) and Niels Johannes Maria Bosch (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems directed to a stage apparatus in an electron beam inspection tool to inspect a sample are disclosed. The stage apparatus comprises a short stroke stage; a long stroke stage; a first sensor...