US Patent Issued to ASML Netherlands on March 11 for "Fluid transfer system in a charged particle system" (Dutch, American Inventors)

ALEXANDRIA, Va., March 12 -- United States Patent no. 12,249,480, issued on March 11, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Fluid transfer system in a charged particle system" was invented by Marcus Adrianus Van De Kerkhof (Helmond, Netherlands), Jing Zhang (Eindhoven, Netherlands), Martijn Petrus Christianus Van Heumen (Santa Clara, Calif.), Patriek Adrianus Alphonsus Maria Bruurs (Baarle-Nassau, Netherlands), Erheng Wang (San Jose, Calif.), Vineet Sharma (San Jose, Calif.), Makfir Sefa (San Jose, Calif.), Shao-Wei Fu (San Jose, Calif.), Simone Maria Scolari (Eindhoven, Netherlands) and Johannes Andreas Henricus Maria Jacobs (Veldhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trad...