US Patent Issued to ASML Netherlands on June 3 for "Apparatus for and method of controlling droplet generator performance" (California Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,324,084, issued on June 3, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Apparatus for and method of controlling droplet generator performance" was invented by Pooriya Beyhaghi (San Diego) and Bob Rollinger (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for and method of controlling formation of droplets used to generate EUV radiation. The droplet source includes a fluid exiting an nozzle and a sub-system having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into droplets that in turn coalesce into larger droplets as they progress towards th...