US Patent Issued to ASML NETHERLANDS on June 24 for "Semiconductor detector and method of fabricating same" (Dutch, American Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,342,635, issued on June 24, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Semiconductor detector and method of fabricating same" was invented by Gianpaolo Lorito (Veldhoven, Netherlands), Stoyan Nihtianov (Eindhoven, Netherlands), Xinqing Liang (Santa Cruz, Calif.) and Kenichi Kanai (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure describes a detector used in critical dimension scanning electron microscopes (CD-SEM) and review SEM systems. In one embodiment, the detector includes a semiconductor structure having a p-n junction and a hole through which a scanning beam is passed to a target. The d...