US Patent Issued to ASML Netherlands on June 24 for "Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process" (Dutch Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,339,592, issued on June 24, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process" was invented by Victor Sebastiaan Dolk (Eindhoven, Netherlands), Koos Van Berkel (Waalre, Netherlands) and Mauritius Gerardus Elisabeth Schneiders (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention provides a method for thermo-mechanical control of a heat sensitive element (MI) subject to a heat load, comprising: -providing a non-linear thermo-mechanical model of the heat sensitive element describing a dynami...