US Patent Issued to ASML Netherlands on July 8 for "Fluid control device and method for fluid control in an extreme ultraviolet light source" (California Inventors)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,352,371, issued on July 8, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Fluid control device and method for fluid control in an extreme ultraviolet light source" was invented by Benjamin Andrew Sams (San Diego), Dietmar Uwe Herbert Trees (San Diego), Theodorus Wilhelmus Driessen (San Diego) and Bob Rollinger (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A fluid control device (100) includes a structure (120) defining a valve cavity, a first fluid port (135), a second fluid port (140), and a third fluid port (145) configured to be fluidly coupled to a hermetic interior (105) of a body; and a plunger valve (130) within the v...