US Patent Issued to ASML NETHERLANDS on July 15 for "Identification of hot spots or defects by machine learning" (Dutch, American Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,461, issued on July 15, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Identification of hot spots or defects by machine learning" was invented by Jing Su (Fremont, Calif.), Yi Zou (Foster City, Calif.), Chenxi Lin (Newark, Calif.), Stefan Hunsche (Santa Clara, Calif.), Marinus Jochemsen (Veldhoven, Netherlands), Yen-Wen Lu (Saratoga, Calif.) and Lin Lee Cheong (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of identifying a hot spot from a design layout or of predicting whether a pattern in a design layout is defective, using a machine learning model. An example method disclosed herein includes obtaining s...